Authors: Maezono, Y Yanagita, H Nishi, K Miyano, JI Yokotani, A Kurosawa, K Hishinuma, N Matsuno, H

Citation: Y. Maezono et al., Room temperature deposition of GeO2 thin film using dielectric barrier discharge driven excimer lamps, J PHYS IV, 11(PR3), 2001, pp. 811-816