Authors:
Hofgen, A
Heera, V
Eichhorn, F
Skorupa, W
Moller, W
Citation: A. Hofgen et al., Annealing and recrystallization of amorphous silicon carbide produced by ion implantation, MAT SCI E B, 61-2, 1999, pp. 353-357
Authors:
Hofgen, A
Heera, V
Eichhorn, F
Skorupa, W
Citation: A. Hofgen et al., Annealing and recrystallization of amorphous silicon carbide produced by ion implantation, J APPL PHYS, 84(9), 1998, pp. 4769-4774