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ENG
Results:
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Results: 1
Ultra-deep anisotropic etching of (110) silicon
Authors:
Holke, A Henderson, HT
Citation:
A. Holke et Ht. Henderson, Ultra-deep anisotropic etching of (110) silicon, J MICROM M, 9(1), 1999, pp. 51-57
Risultati:
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