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Results: 1-2 |
Results: 2
Through-wafer optical probe characterization for microelectromechanical systems positional state monitoring and feedback control
Authors: Dawson, JM Chen, J Brown, KS Famouri, P Hornak, LA
Citation: Jm. Dawson et al., Through-wafer optical probe characterization for microelectromechanical systems positional state monitoring and feedback control, OPT ENG, 39(12), 2000, pp. 3239-3246
Optical methods for micromachine monitoring and feedback
Authors: Dickey, FM Holswade, SC Hornak, LA Brown, KS
Citation: Fm. Dickey et al., Optical methods for micromachine monitoring and feedback, SENS ACTU-A, 78(2-3), 1999, pp. 220-235
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