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Results:
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Results: 2
Dependence of grown-in defect behavior on oxygen concentration in Czochralski silicon crystals
Authors:
Umeno, S Yanase, Y Hourai, M Sano, M Shida, Y Tsuya, H
Citation:
S. Umeno et al., Dependence of grown-in defect behavior on oxygen concentration in Czochralski silicon crystals, JPN J A P 1, 38(10), 1999, pp. 5725-5730
Effect of heavy boron doping on oxide precipitate growth in Czochralski silicon
Authors:
Ono, T Asayama, E Horie, H Hourai, M Sueoka, K Tsuya, H Rozgonyi, GA
Citation:
T. Ono et al., Effect of heavy boron doping on oxide precipitate growth in Czochralski silicon, J ELCHEM SO, 146(6), 1999, pp. 2239-2244
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