Authors: Lalinsky, T Skriniarova, J Kostic, I van der Hart, A Hrkut, P Hascik, S Matay, L Mozolova, Z Kordos, P

Citation: T. Lalinsky et al., T-shaped gates for heterostructure field effect transistors, VACUUM, 61(2-4), 2001, pp. 329-332

Authors: Hascik, S Hrkut, P Kostic, I Konecnikova, A

Citation: S. Hascik et al., Dry etching of carbon layers in various etch gases, VACUUM, 58(2-3), 2000, pp. 434-439

Authors: Hudek, P Hrkut, P Drzik, M Kostic, I Belov, M Torres, J Wasson, J Wolfe, JC Degen, A Rangelow, IW Voigt, J Butschke, J Letzkus, F Springer, R Ehrmann, A Kaesmaier, R Kragler, K Mathuni, J Haugeneder, E Loschner, H

Citation: P. Hudek et al., Directly sputtered stress-compensated carbon protective layer for silicon stencil masks, J VAC SCI B, 17(6), 1999, pp. 3127-3131