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Hutton, B
McQuaid, RW
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Authors:
Craciun, V
Boyd, IW
Perriere, J
Hutton, B
Nicholls, EJ
Citation: V. Craciun et al., Characteristics of dielectric layers formed by low-temperature vacuum ultraviolet-assisted oxidation of SiGe layers, J MATER RES, 14(9), 1999, pp. 3525-3529
Authors:
Craciun, V
Boyd, IW
Hutton, B
Williams, D
Citation: V. Craciun et al., Characteristics of dielectric layers grown on Ge by low temperature vacuumultraviolet-assisted oxidation, APPL PHYS L, 75(9), 1999, pp. 1261-1263