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Results: 1
193 nm single layer resist strategies, concepts, and recent results
Authors:
Nalamasu, O Houlihan, FM Cirelli, RA Timko, AG Watson, GP Hutton, RS Kometani, JM Reichmanis, E Gabor, A Medina, A Slater, S
Citation:
O. Nalamasu et al., 193 nm single layer resist strategies, concepts, and recent results, J VAC SCI B, 16(6), 1998, pp. 3716-3721
Risultati:
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