Authors: INOUE Y TANIMOTO S TSUJIMURA K YAMASHITA T IBARA Y YAMASHITA Y YONEDA K

Citation: Y. Inoue et al., BEHAVIOR OF TIN AND TI BARRIER METALS IN AL-BARRIER-AL VIA HOLE METALLIZATION, Journal of the Electrochemical Society, 141(4), 1994, pp. 1056-1061