Authors: LAYADI N ICABARROCAS PR GERRI M MARINE W SPOUSTA J

Citation: N. Layadi et al., EXCIMER-LASER-ASSISTED RF GLOW-DISCHARGE DEPOSITION OF AMORPHOUS AND MICROCRYSTALLINE SILICON THIN-FILMS, Applied physics. A, Solids and surfaces, 58(5), 1994, pp. 507-512