Authors: NIKPOUR B LANDSBERGER LM HUBBARD TJ KAHRIZI M IFTIMIE A

Citation: B. Nikpour et al., CONCAVE CORNER COMPENSATION BETWEEN VERTICAL (010)-(001)PLANES ANISOTROPICALLY ETCHED IN SI(100), Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 299-307