Authors:
Ikegawa, M
Yuan, JL
Matsumoto, K
Herrmann, S
Iwamoto, A
Nakamura, T
Matsushita, S
Kimura, T
Honjo, T
Tashiro, K
Citation: M. Ikegawa et al., Elevated plasma stromal cell-derived factor 1 protein level in the progression of HIV type I infection/AIDS, AIDS RES H, 17(7), 2001, pp. 587-595
Citation: M. Ikegawa et al., Effects of gas-flow structures on radical and etch-product density distributions on wafers in magnetomicrowave plasma etching reactors, J VAC SCI A, 19(2), 2001, pp. 460-466
Citation: M. Ikegawa et al., Scale-up of a parallel plate RF plasma etching reactor by using reactive gas flow simulations, J ELCHEM SO, 148(8), 2001, pp. G456-G464