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Results:
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Results: 1
Dependence of ion implantation: Induced defects on substrate doping
Authors:
Kanemoto, K Imaizumi, F Hamada, T Tamai, Y Nakada, A Ohmi, T
Citation:
K. Kanemoto et al., Dependence of ion implantation: Induced defects on substrate doping, J APPL PHYS, 89(6), 2001, pp. 3156-3161
Risultati:
1-1
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