Authors:
Itoga, T
Hozawa, K
Takeda, K
Isomae, S
Ohkura, M
Citation: T. Itoga et al., New technique to determine gettering efficiency of heavy metals and its application to carbon-ion-implanted Si epitaxial wafers, JPN J A P 1, 40(4A), 2001, pp. 2105-2109
Authors:
Takeda, K
Isomae, S
Ohkura, M
Maeshima, M
Matsui, S
Citation: K. Takeda et al., Simultaneous measurement of size and depth of each defect in a silicon wafer using light scattering at two wavelengths: Principle, limitation and applications of optical shallow defect analyzer, JPN J A P 1, 38(6A), 1999, pp. 3776-3783