Authors:
Itoga, T
Hozawa, K
Takeda, K
Isomae, S
Ohkura, M
Citation: T. Itoga et al., New technique to determine gettering efficiency of heavy metals and its application to carbon-ion-implanted Si epitaxial wafers, JPN J A P 1, 40(4A), 2001, pp. 2105-2109