Authors:
Ivanova, AR
Nuesca, G
Chen, XM
Goldberg, C
Kaloyeros, AE
Arkles, B
Sullivan, JJ
Citation: Ar. Ivanova et al., The effects of processing parameters in the chemical vapor deposition of cobalt from cobalt tricarbonyl nitrosyl, J ELCHEM SO, 146(6), 1999, pp. 2139-2145