Citation: Sa. Jang et al., FIELD OXIDE THINNING BEHAVIOR IN LOCAL OXIDATION OF SILICON PROCESS UNDER ENHANCED OXIDATION CONDITIONS, Journal of the Electrochemical Society, 145(5), 1998, pp. 1664-1667
Citation: Sa. Jang et al., EVALUATION OF DOUBLE SPACER LOCAL OXIDATION OF SILICON (LOCOS) ISOLATION PROCESS FOR SUB-QUARTER MICRON DESIGN RULE, JPN J A P 1, 36(3B), 1997, pp. 1433-1438
Authors:
HAN JH
JANG SA
AHN YB
SONG KH
YOO SJ
LEE JM
SON HS
YOON KH
KANG MI
CHA BY
LEE KW
SON HY
KANG SK
Citation: Jh. Han et al., EFFECTS OF LEVOTHYROXINE SUPPRESSIVE THERAPY ON BONE-MINERAL DENSITY AND BONE METABOLISM IN PREMENOPAUSAL WOMEN WITH BENIGN THYROID-NODULE, Journal of bone and mineral research, 12, 1997, pp. 507-507
Citation: Sa. Jang et al., A MECHANISM OF FIELD-OXIDE-UNGROWTH PHENOMENON IN RECESSED ISOLATION PROCESS AND PRACTICAL SOLUTION, Journal of the Electrochemical Society, 144(8), 1997, pp. 2933-2940
Citation: Bj. Cho et al., ANOMALOUS FIELD-OXIDE-UNGROWTH PHENOMENON IN RECESSED LOCAL OXIDATIONOF SILICON ISOLATION STRUCTURE, Journal of the Electrochemical Society, 144(1), 1997, pp. 320-326