Authors:
BANERJEE S
PARK YJ
LEE DR
JEONG YH
LEE KB
YOON SB
JO BH
CHOI HM
CHO WJ
Citation: S. Banerjee et al., EFFECTS OF OXIDATION PROCESS ON INTERFACE ROUGHNESS OF GATE OXIDES ONSILICON - X-RAY REFLECTIVITY STUDY, Applied physics letters, 72(4), 1998, pp. 433-435