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JOUAN PY
VANDERBECQ AC
DAUCHOT JP
WAUTELET M
HECQ M
Citation: Py. Jouan et al., STUDY OF AN RF PLANAR MAGNETRON SPUTTERING DISCHARGE WITH LANGMUIR PROBE MEASUREMENTS, Surface & coatings technology, 98(1-3), 1998, pp. 1426-1432
Citation: Py. Jouan et G. Lemperiere, STUDY OF A RF PLANAR MAGNETRON SPUTTERING DISCHARGE - DISCHARGE CHARACTERISTICS AND PLASMA DIAGNOSTICS, Vacuum, 45(1), 1994, pp. 89-95
Citation: Py. Jouan et G. Lemperiere, INFLUENCE OF LOW-ENERGY ION-BOMBARDMENT ON THE PROPERTIES OF TIN FILMS DEPOSITED BY RF MAGNETRON SPUTTERING, Thin solid films, 237(1-2), 1994, pp. 200-207
Authors:
JOUAN PY
PEIGNON MC
CARDINAUD C
LEMPERIERE G
Citation: Py. Jouan et al., CHARACTERIZATION OF TIN COATINGS AND OF THE TIN SI INTERFACE BY X-RAYPHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON SPECTROSCOPY/, Applied surface science, 68(4), 1993, pp. 595-603