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Citation: Yz. Juang et al., REACTIVE ION ETCHING FOR ALGAINP GAINP LASER STRUCTURES/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2031-2036

Authors: JUANG YZ SU YK SHEI SC FANG BC

Citation: Yz. Juang et al., COMPARING REACTIVE ION ETCHING OF III-V COMPOUNDS IN CL-2 BCL3/AR ANDCCL2F2/BCL3/AR DISCHARGES/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(1), 1994, pp. 75-82

Authors: SU YK JUANG YZ SHEI SC FANG BC

Citation: Yk. Su et al., A STUDY OF SELECTIVE AND NONSELECTIVE REACTIVE ION ETCHING OF GAAS A1GAAS MATERIALS/, Solid-state electronics, 36(12), 1993, pp. 1779-1785