Authors:
Hebner, GA
Blain, MG
Hamilton, TW
Nichols, CA
Jarecki, RL
Citation: Ga. Hebner et al., Surface dependent electron and negative ion density in inductively coupleddischarges, J VAC SCI A, 17(6), 1999, pp. 3172-3178
Authors:
Woodworth, JR
Blain, MG
Jarecki, RL
Hamilton, TW
Aragon, BP
Citation: Jr. Woodworth et al., Absolute intensities of the vacuum ultraviolet spectra in a metal-etch plasma processing discharge, J VAC SCI A, 17(6), 1999, pp. 3209-3217