Authors: Jung, KB Hong, J Childress, JR Pearton, SJ Sharifi, F Jenson, M Hurst, AT

Citation: Kb. Jung et al., Plasma etching of NiFe Cu and NiMnSb/Al2O3 multilayers for sub-micron pattern definition, J MAGN MAGN, 199, 1999, pp. 204-206

Authors: Jung, KB Hong, J Cho, H Caballero, JA Childress, JR Pearton, SJ Jenson, M Hurst, AT

Citation: Kb. Jung et al., High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elements, APPL SURF S, 139, 1999, pp. 111-116