Authors: Krafcsik, OH Vida, G Pocsik, I Josepovits, KV Deak, P

Citation: Oh. Krafcsik et al., Carbon diffusion through SiO2 from a hydrogenated amorphous carbon layer and accumulation at the SiO2/Si interface, JPN J A P 1, 40(4A), 2001, pp. 2197-2200