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Results: 1
Improvement of silicon direct bonding using surfaces activated by hydrogenplasma treatment
Authors:
Choi, WB Ju, CM Lee, JS Sung, MY
Citation:
Wb. Choi et al., Improvement of silicon direct bonding using surfaces activated by hydrogenplasma treatment, J KOR PHYS, 37(6), 2000, pp. 878-881
Risultati:
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