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RAMBAUD MM
HAM TE
STEVIE FA
KAHORA PM
ZANESKI G
THOMA MJ
BOULIN DM
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Authors:
STEVIE FA
SHANE TC
KAHORA PM
HULL R
BAHNCK D
KANNAN VC
DAVID E
Citation: Fa. Stevie et al., APPLICATIONS OF FOCUSED ION-BEAMS IN MICROELECTRONICS PRODUCTION, DESIGN AND DEVELOPMENT, Surface and interface analysis, 23(2), 1995, pp. 61-68