Authors:
MORI S
ARAKI YY
SATO M
MEGURO H
TSUNODA H
KAMIYA E
YOSHIKAWA K
ARAI N
SAKAGAMI E
Citation: S. Mori et al., THICKNESS SCALING LIMITATION FACTORS OF ONO INTERPOLY DIELECTRIC FOR NONVOLATILE MEMORY DEVICES, I.E.E.E. transactions on electron devices, 43(1), 1996, pp. 47-53