Authors: KAMLET LI TERRY FL

Citation: Li. Kamlet et Fl. Terry, DIELECTRIC FUNCTION MODELING FOR IN1-YALYAS ON INP, Thin solid films, 313, 1998, pp. 177-182

Authors: BENSON TE RAMAMOORTHY A KAMLET LI TERRY FL

Citation: Te. Benson et al., HIGH-SPEED, HIGH-ACCURACY OPTICAL MEASUREMENTS OF POLYCRYSTALLINE SILICON FOR PROCESS-CONTROL, Thin solid films, 313, 1998, pp. 435-441

Authors: HANISH CK GRIZZLE JW CHEN HH KAMLET LI THOMAS S TERRY FL PANG SW

Citation: Ck. Hanish et al., MODELING AND ALGORITHM DEVELOPMENT FOR AUTOMATED OPTICAL ENDPOINTING OF AN HBT EMITTER ETCH, Journal of electronic materials, 26(12), 1997, pp. 1401-1408

Authors: KAMLET LI TERRY FL MARACAS GN

Citation: Li. Kamlet et al., A TEMPERATURE-DEPENDENT MODEL FOR THE COMPLEX DIELECTRIC FUNCTION OF GAAS, Journal of electronic materials, 26(12), 1997, pp. 1409-1416

Authors: BENSON TE KAMLET LI RUEGSEGGER SM HANISH CK HANISH PD RASHAP BA KLIMECKY P FREUDENBERG JS GRIZZLE JW KHARGONEKAR PP TERRY FL BARNEY B

Citation: Te. Benson et al., SENSOR SYSTEMS FOR REAL-TIME FEEDBACK-CONTROL OF REACTIVE ION ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 483-488

Authors: KAMLET LI TERRY FL

Citation: Li. Kamlet et Fl. Terry, A COMPOSITION-DEPENDENT MODEL FOR THE COMPLEX DIELECTRIC FUNCTION OF IN1-XGAXASYP1-Y LATTICE-MATCHED TO INP, Journal of electronic materials, 24(12), 1995, pp. 2005-2013