Authors: CIMALLA V KARAGODINA KV PEZOLDT J EICHHORN G

Citation: V. Cimalla et al., GROWTH OF THIN BETA-SIC LAYERS BY CARBONIZATION OF SI SURFACES BY RAPID THERMAL-PROCESSING, Materials science & engineering. B, Solid-state materials for advanced technology, 29(1-3), 1995, pp. 170-175