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Results:
1-12
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Results: 12
Authors:
KAL S
KASKO I
RYSSEL H
Citation: S. Kal et al., NONCONTACTING MEASUREMENT OF THICKNESS OF THIN TITANIUM SILICIDE FILMS USING SPECTROSCOPIC ELLIPSOMETER, IEEE electron device letters, 19(4), 1998, pp. 127-130
Authors:
KASKO I
KAL S
RYSSEL H
Citation: I. Kasko et al., CHARACTERIZATION OF THIN TISI2 FILMS BY SPECTROSCOPIC ELLIPSOMETRY AND THERMAL-WAVE ANALYSIS, Microelectronic engineering, 37-8(1-4), 1997, pp. 455-460
Authors:
KURMAEV EZ
SHAMIN SN
GALAKHOV VR
KASKO I
Citation: Ez. Kurmaev et al., APPLICATION OF HIGH-ENERGY RESOLVED X-RAY-EMISSION SPECTROSCOPY FOR MONITORING OF SILICIDE FORMATION IN CO SIO2/SI SYSTEM/, Thin solid films, 311(1-2), 1997, pp. 28-32
Authors:
KAL S
KASKO I
RYSSEL H
Citation: S. Kal et al., ION-BEAM MIXED ULTRA-THIN COBALT SILICIDE (COSI2) FILMS BY COBALT SPUTTERING AND RAPID THERMAL ANNEALING, Journal of electronic materials, 24(10), 1995, pp. 1349-1355
Authors:
KAL S
KASKO I
RYSSEL H
Citation: S. Kal et al., PREPARATION AND CHARACTERIZATION OF ULTRA-THIN COBALT SILICIDE FOR VLSI APPLICATIONS, Bulletin of Materials Science, 18(5), 1995, pp. 531-539
Authors:
KASKO I
DEHM C
GYULAI J
RYSSEL H
Citation: I. Kasko et al., ION-BEAM MIXING OF CO-SI AND CO-SIO2 - A COMPARISON BETWEEN MONTE-CARLO SIMULATIONS AND EXPERIMENTS, Radiation effects and defects in solids, 130, 1994, pp. 345-352
Authors:
FREY L
PICHLER P
KASKO I
THIES I
LIPP S
STRECKFUSS N
GONG L
RYSSEL H
Citation: L. Frey et al., PRACTICAL ASPECTS OF ION-BEAM ANALYSIS OF SEMICONDUCTOR STRUCTURES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 356-362
Authors:
DEHM C
KASKO I
RYSSEL H
Citation: C. Dehm et al., ION-BEAM-INDUCED COSI2 LAYERS - FORMATION AND CONTACT PROPERTIES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 84(2), 1994, pp. 148-152
Authors:
KAL S
KASKO I
RYSSEL H
Citation: S. Kal et al., SINGLE-CRYSTAL GROWTH OF SI-GE ALLOY BY ION-IMPLANTATION AND SEQUENTIAL RAPID THERMAL ANNEAL, Electronics Letters, 30(3), 1994, pp. 272-274
Authors:
DEHM C
KASKO I
BURTE EP
GYULAI J
RYSSEL H
Citation: C. Dehm et al., INFLUENCE OF OXIDE THICKNESS ON ION-BEAM-INDUCED AND THERMAL COSI2 FORMATION, Applied surface science, 73, 1993, pp. 268-276
Authors:
DEHM C
RAUM B
KASKO I
RYSSEL H
Citation: C. Dehm et al., INFLUENCE OF IMPURITIES ON ION-BEAM-INDUCED TISI2 FORMATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 759-763
Authors:
KASKO I
DEHM C
FREY L
RYSSEL H
Citation: I. Kasko et al., EFFECT OF ION-BEAM MIXING TEMPERATURE ON COBALT SILICIDE FORMATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 786-789
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