Authors: VARICHENKO VS ZAITSEV AM MELNIKOV AA FAHRNER WR KASYTCHITS NM PENINA NM ERCHAK DP

Citation: Vs. Varichenko et al., DEFECT PRODUCTION IN SILICON IMPLANTED WITH 13.6-MEV BORON IONS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 94(3), 1994, pp. 259-265