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Results: 1
ASPECT RATIO-DEPENDENT ETCHING ON METAL ETCH - MODELING AND EXPERIMENT
Authors:
XIE RJ KAVA JD SIEGEL M
Citation:
Rj. Xie et al., ASPECT RATIO-DEPENDENT ETCHING ON METAL ETCH - MODELING AND EXPERIMENT, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1067-1071
Risultati:
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