Authors: IVANOV I KAZANSKY P HULTMAN L PETROV I SUNDGREN JE

Citation: I. Ivanov et al., INFLUENCE OF AN EXTERNAL AXIAL MAGNETIC-FIELD ON THE PLASMA CHARACTERISTICS AND DEPOSITION CONDITIONS DURING DIRECT-CURRENT PLANAR MAGNETRON SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(2), 1994, pp. 314-320

Authors: IVANOV I KAZANSKY P HULTMAN L SUNDGREN JE

Citation: I. Ivanov et al., ELECTRON-ENERGY DISTRIBUTION FUNCTION IN DC MAGNETRON AXIALLY-SYMMETRICAL DISCHARGES - EVIDENCE OF SPATIAL ANISOTROPY, Journal of physics. D, Applied physics, 27(2), 1994, pp. 280-285