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Authors: IRMER B KEHRLE M LORENZ H KOTTHAUS JP
Citation: B. Irmer et al., NANOLITHOGRAPHY BY NONCONTACT AFM-INDUCED LOCAL OXIDATION - FABRICATION OF TUNNELING BARRIERS SUITABLE FOR SINGLE-ELECTRON DEVICES, Semiconductor science and technology, 13(8A), 1998, pp. 79-82

Authors: IRMER B KEHRLE M LORENZ H KOTTHAUS JP
Citation: B. Irmer et al., FABRICATION OF TI TIOX TUNNELING BARRIERS BY TAPPING MODE ATOMIC-FORCE MICROSCOPY INDUCED LOCAL OXIDATION/, Applied physics letters, 71(12), 1997, pp. 1733-1735
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