Authors: LAU WS CHOR EF KEK SP AZIZ WHB LIM HC HENG CH ZHAO R

Citation: Ws. Lau et al., THE DEVELOPMENT OF A HIGHLY SELECTIVE KI I-2/H2O/H2SO4 ETCHANT FOR THE SELECTIVE ETCHING OF AL0.3GA0.7AS OVER GAAS/, JPN J A P 1, 36(6A), 1997, pp. 3770-3774