Authors: DEGENDT S KNOTTER DM KENIS K DEPAS M MEURIS M MERTENS PW HEYNS MM

Citation: S. Degendt et al., IMPACT OF ORGANIC CONTAMINATION ON THIN GATE OXIDE QUALITY, JPN J A P 1, 37(9A), 1998, pp. 4649-4655

Authors: DEGENDT S KNOTTER DM KENIS K MERTENS PW HEYNS MM

Citation: S. Degendt et al., IMPACT OF IRON CONTAMINATION AND ROUGHNESS GENERATED IN AMMONIA HYDROGEN-PEROXIDE MIXTURES (SC1) ON 5 NM GATE OXIDES, Journal of the Electrochemical Society, 145(7), 1998, pp. 2589-2594