Authors: KILGORE MD DAUGHERTY JE PORTEOUS RK GRAVES DB

Citation: Md. Kilgore et al., TRANSPORT AND HEATING OF SMALL PARTICLES IN HIGH-DENSITY PLASMA SOURCES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 486-493

Authors: KILGORE MD WU HM GRAVES DB

Citation: Md. Kilgore et al., NEUTRAL TRANSPORT IN HIGH PLASMA-DENSITY REACTORS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 494-506

Authors: KILGORE MD DAUGHERTY JE PORTEOUS RK GRAVES DB

Citation: Md. Kilgore et al., ION DRAG ON AN ISOLATED PARTICULATE IN A LOW-PRESSURE DISCHARGE, Journal of applied physics, 73(11), 1993, pp. 7195-7202