Authors:
KLEINDIEK S
KIM HS
KRATSCHMER E
CHANG THP
Citation: S. Kleindiek et al., MINIATURE 3-AXIS MICROPOSITIONER FOR SCANNING PROXIMAL PROBE AND OTHER APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2653-2656