Authors: KLOSNER MA SILFVAST WT

Citation: Ma. Klosner et Wt. Silfvast, INTENSE XENON CAPILLARY DISCHARGE EXTREME-ULTRAVIOLET SOURCE IN THE 10-16-NM-WAVELENGTH REGION, Optics letters, 23(20), 1998, pp. 1609-1611

Authors: KLOSNER MA BENDER HA SILFVAST WT ROCCA JJ

Citation: Ma. Klosner et al., INTENSE PLASMA DISCHARGE SOURCE AT 13.5 NM FOR EXTREME-ULTRAVIOLET LITHOGRAPHY, Optics letters, 22(1), 1997, pp. 34-36