Authors: KLUMPERWESTKAMP H MEHNER A HOFFMANN F MAYR P

Citation: H. Klumperwestkamp et al., PLASMA SENSOR MEASUREMENT IN PULSED PACVD-PLASMAS, Materialwissenschaft und Werkstofftechnik, 29(9), 1998, pp. 459-465

Authors: MEHNER A KLUMPERWESTKAMP H HOFFMANN F MAYR P

Citation: A. Mehner et al., CRYSTALLIZATION AND RESIDUAL-STRESS FORMATION OF SOL-GEL-DERIVED ZIRCONIA FILMS, Thin solid films, 308, 1997, pp. 363-368

Authors: KLUMPERWESTKAMP H MAYR P

Citation: H. Klumperwestkamp et P. Mayr, TINX MAGNETRON SPUTTER COATING CONTROLLED BY AN IN-SITU EDDY-CURRENT SENSOR, Thin solid films, 241(1-2), 1994, pp. 30-33