Authors: SONG WY JUNG KY O BH PARK BC KO YU

Citation: Wy. Song et al., DEVELOPMENT OF A LASER DIFFRACTOMETER WITH IMPROVED ACCURACY FOR MEASUREMENT OF THE GRATING PERIOD, Journal of the Korean Physical Society, 33(4), 1998, pp. 434-438

Authors: KO YU KIM SW CHUNG MS

Citation: Yu. Ko et al., MONTE-CARLO SIMULATION OF CHARGING EFFECTS ON LINEWIDTH METROLOGY, Scanning, 20(6), 1998, pp. 447-455