Authors: ZAGOZDZONWOSIK W KORABLEV K RUSAKOVA I SIMONS D SHI JH CHI P WOLFE JC

Citation: W. Zagozdzonwosik et al., FORMATION OF SHALLOW JUNCTIONS DURING RAPID THERMAL-PROCESSING FROM ELECTRON-BEAM DEPOSITED BORON SOURCES, Journal of the Electrochemical Society, 143(9), 1996, pp. 2981-2989