Authors: NIWA M KOUZAKI T OKADA K UDAGAWA M SINCLAIR R

Citation: M. Niwa et al., ATOMIC-ORDER PLANARIZATION OF ULTRATHIN SIO2 SI(001) INTERFACES/, JPN J A P 1, 33(1B), 1994, pp. 388-394

Authors: SEKIGUCHI M SAWADA K FUKUMOTO M KOUZAKI T

Citation: M. Sekiguchi et al., ELECTROMIGRATION IN ALSICU TIN/TI INTERCONNECTS WITH TI AND TIN ADDITIONAL LAYERS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(5), 1994, pp. 2992-2996