Authors: KRUKAR R KORNBLIT A CLARK LA KRUSKAL J LAMBERT D REITMAN EA GOTTSCHO RA

Citation: R. Krukar et al., REACTIVE ION ETCHING PROFILE AND DEPTH CHARACTERIZATION USING STATISTICAL AND NEURAL-NETWORK ANALYSIS OF LIGHT-SCATTERING DATA, Journal of applied physics, 74(6), 1993, pp. 3698-3706