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Authors: KUBENA RL ATKINSON GM ROBINSON WP STRATTON FP

Citation: Rl. Kubena et al., A NEW HIGH-PERFORMANCE SURFACE-MICROMACHINED TUNNELING ACCELEROMETER FABRICATED USING NANOLITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4029-4033

Authors: KUBENA RL ATKINSON GM ROBINSON WP STRATTON FP

Citation: Rl. Kubena et al., A NEW MINIATURIZED SURFACE MICROMACHINED TUNNELING ACCELEROMETER, IEEE electron device letters, 17(6), 1996, pp. 306-308