Authors:
KIM ED
KIM SC
PARK JM
GREKHOV IV
ARGUNOVA TS
KOSTINA LS
KUDRYAVTZEVA TV
Citation: Ed. Kim et al., STRUCTURAL QUALITY OF DIRECTLY BONDED SILICON-WAFERS WITH REGULARLY GROOVED INTERFACES, Journal of the Electrochemical Society, 144(2), 1997, pp. 622-627