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Results: 1
IN-SITU MASS-SPECTRAL AND INFRARED STUDIES OF THE GAS-PHASE EVOLUTIONAND DECOMPOSITION PATHWAYS OF CU-II(HFAC)(2) - APPLICATION IN THE DEVELOPMENT OF PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION OF COPPER
Authors: ZHENG B BRAECKELMANN G KUJAWSKI K LOU I LANE S KALOYEROS AE
Citation: B. Zheng et al., IN-SITU MASS-SPECTRAL AND INFRARED STUDIES OF THE GAS-PHASE EVOLUTIONAND DECOMPOSITION PATHWAYS OF CU-II(HFAC)(2) - APPLICATION IN THE DEVELOPMENT OF PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION OF COPPER, Journal of the Electrochemical Society, 142(11), 1995, pp. 3896-3903
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