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AAGAARD K
PEASE CH
SALO SA
WEINGARTNER T
PAVLOV V
KULAKOV M
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Authors:
DONIG F
FELTZ A
KULAKOV M
HESSEL HE
MEMMERT U
BEHM RJ
Citation: F. Donig et al., GAS-PHASE ETCHING OF SI(111)-(7X7) SURFACES BY OXYGEN OBSERVED BY SCANNING-TUNNELING-MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 1955-1961