Authors:
LEVY RA
MASTROMATTEO E
GROW JM
PATURI V
KUO WP
BOEGLIN HJ
SHALVOY R
Citation: Ra. Levy et al., LOW-PRESSURE CHEMICAL-VAPOR-DEPOSITION OF B-N-C-H FILMS FROM TRIETHYLAMINE BORANE COMPLEX, Journal of materials research, 10(2), 1995, pp. 320-327