Authors: KOHL F JACHIMOWICZ A STEURER J GLATZ R KUTTNER J BIACOVSKY D OLCAYTUG F URBAN G

Citation: F. Kohl et al., A MICROMACHINED FLOW SENSOR FOR LIQUID AND GASEOUS FLUIDS, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 293-299