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Results: 1
Thermodynamic approach to the redistribution of boron and fluorine implanted at the interface of an SiO2/Si system
Authors:
Reti, F Sassi, Z Kaabi, L Bureau, JC Vincent, H Balland, B
Citation:
F. Reti et al., Thermodynamic approach to the redistribution of boron and fluorine implanted at the interface of an SiO2/Si system, SURF INT AN, 30(1), 2000, pp. 387-390
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